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    DSASW0052109.pdf

    • Hamamatsu Photonics
    • PHOTODIODE Si S8551, S8552, S8553 VUV () S8551, S8552, S8553VUV () ArF (=193 nm) VUVVUV l ArF (=193 nm) l l ArF l UV S8551: 5.8 × 5.8 mm S8552: 10 × 10 mm S8553: 18 × 18
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