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DSAZSAA00014781.pdf
Manufacturer
Skyworks Solutions
Partial File Text
Effects of Electron Radiation Generated during E-beam Evaporation on a Photoresist Liftoff Process Kezia Cheng, Minh Le, Donald Mitchell, Larry Hanes Skyworks Solutions, Inc. 20 Sylvan Road, Woburn
Type
Original
ECAD Model
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Effects of Electron Radiation Generated during E-beam Evaporation on a Photoresist Liftoff Process