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DSA0038492.pdf
Manufacturer
Veeco Instruments
Partial File Text
Low Temperature SUMO Source 400g Low Temperature SUMO Source · Patented design with more than 175 in the field · Versatile high-performance source for low temperature evaporation · Dual
Type
Original
ECAD Model
Part Details
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4500G
alumel
chromel
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GEN200
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GEN930
orifice
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ST SEMICON INC
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