DASF0020512.pdf
by Panasonic
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PF PRESSURE SENSOR
04.11.10 11:32 AM
Page 38
PF (ADP1)
PF PRESSURE
SENSOR
PRECISION
SEMICONDUCTOR
PRESSURE SENSOR
<Cross-section of Sensor Chip>
Silicon
Piezo resistance
stra
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Original
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Unknown
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Unknown
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Unknown
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