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    DSASW00186870.pdf by Fujitsu

    • LCOS Backplane Process v Features · 0.65µm/0.5µm/0.35µm FEOL - Supply Voltage: 3.3V/5.0V ... - Option: High voltage (13V/25V) Diffusion Resistor Bulk-Poly capacitor · 0.35µm BEOL - CMP planar more
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