DSAZSAA00014762.pdf

Partial File Text Effects of Ohmic Metal on Electrochemical Etching of GaAs in pHEMT Manufacturing Kezia Cheng Skyworks Solutions Inc., 20 Sylvan Road, Woburn, MA 01801 kezia.cheng@skyworksinc.com (781) 241-2821 Ke
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Effects of Ohmic Metal on Electrochemical Etching of GaAs in pHEMT Manufacturing