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DSA3H0011214.pdf
by Sensirion
Partial File Text
SFC4000 Ultra-Fast CMOSens Mass Flow Controller for Gases - High accuracy Mass Flow Controller (0.8% of set point for 10 100% FS) - Ultra fast settling time (<100ms to within 2% of setpoint) - C
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flow mass controller
SFC4000
SFC4100
SSL316L