DSA0084481.pdf
by Oriel Instruments
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SILICON DETECTORS
Light Sources
0.4
UV-ENHANCED
SILICON
0.2
VIS-IR
SILICON
0.0
200
400
600
800
1000
1200
Photolithography
TYPICAL RESPONSIVITY (A/W)
0.6
WAV
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Original
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Unknown
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Unknown
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Unknown
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