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DSASW0052159.pdf
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NEW PHOTODIODE Si S9682, S9683 VUV VUV ()Si l ArF (=193 nm) l l : l ArF l S9682: 5.8 × 5.8 mm (TO-8) S9683: 10 × 10 mm (1) s (Ta=25 °C) VR Max. To
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S9682
S9683