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    Abstract: No abstract text available
    Text: Production by order X-ray Direct CCD Camera X-ray Direct CCD Camera is the structure which is irradiated EUV and soft X-ray photons into CCD directly without using scintillator. Many electrons are generated into CCD by irradiating high energy photons, so high sensitive detection is realized.


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    PDF SCAS0013E05 JUN/2012